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84.86 专用于或主要用于制造半导体单晶柱或圆片、半导体器件、集成电路或平板显示器的机器及装置;本章注释九(三)规定的机器及装置;零件及附件:
84.86 Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 9 (C) to this Chapter; parts and accessories:


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